Shiqi Guo, Dong Yang, Baichen Li, Quan Dong, Zhenyu Li, M. Zaghloul
{"title":"An Artificial Intelligent Flexible Gas Sensor Based on Ultra-Large Area MoSe2 Nanosheet","authors":"Shiqi Guo, Dong Yang, Baichen Li, Quan Dong, Zhenyu Li, M. Zaghloul","doi":"10.1109/MWSCAS.2019.8885301","DOIUrl":null,"url":null,"abstract":"Flexible electronic applications based on transition metal dichalcogenides (TMDCs) nanosheet are extremely impressive recently. Synthesis of ultra-large area atomic layer molybdenum diselenide (MoSe2) on a flexible substrate is the kernel of the fabrication process. In this work, we successfully transferred the ultra-large area of MoSe2 atomic layer flakes on Kapton film with gold-mediated exfoliation method. The large area MoSe2 nanosheet works as an active chemical gas sensing channel for flexible functional devices. The two terminal flexible gas sensor exhibited high responsivity under concentration for NH3 and NO2 of 5ppm and 1ppm, respectively. The flexible electronics were bent and further tested with an external circuit. In addition, an artificial intelligent data processing method with machine learning is applied to localize the toxic gas source. These results suggested that wearable large area MoSe2 atomic layer is promising for wearable environmental detection applications.","PeriodicalId":287815,"journal":{"name":"2019 IEEE 62nd International Midwest Symposium on Circuits and Systems (MWSCAS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 62nd International Midwest Symposium on Circuits and Systems (MWSCAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSCAS.2019.8885301","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
Flexible electronic applications based on transition metal dichalcogenides (TMDCs) nanosheet are extremely impressive recently. Synthesis of ultra-large area atomic layer molybdenum diselenide (MoSe2) on a flexible substrate is the kernel of the fabrication process. In this work, we successfully transferred the ultra-large area of MoSe2 atomic layer flakes on Kapton film with gold-mediated exfoliation method. The large area MoSe2 nanosheet works as an active chemical gas sensing channel for flexible functional devices. The two terminal flexible gas sensor exhibited high responsivity under concentration for NH3 and NO2 of 5ppm and 1ppm, respectively. The flexible electronics were bent and further tested with an external circuit. In addition, an artificial intelligent data processing method with machine learning is applied to localize the toxic gas source. These results suggested that wearable large area MoSe2 atomic layer is promising for wearable environmental detection applications.