Ballistic transport in short channel field effect transistors

M. Shur
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引用次数: 1

Abstract

The feature sizes of short channel Si MOSFETs and FINFETs are now in the range, where ballistic or quasi-ballistic transport is dominant. In this regime, conventional notion of electron mobility becomes invalid, and electrons lose energy and momentum in the contacts rather than in the device channel. In these devices, electron inertia plays an important role, and oscillations of the electron density (called plasma oscillations) enable the device response at THz frequencies. At THz and sub-THz frequencies, electron inertia effects, which are the signature of the ballistic transport, are pronounced even in FETs with feature sizes as large as 1 micron. Due to these effects, the device impedance becomes an oscillatory function of frequency. Plasma wave THz detectors using oscillations of the electron density in device channels are expected to outperform more conventional THz detectors. Fig. 1 shows the calculated Si MOSFET THz detector responsivity versus frequency. Achieving their full potential of plasma wave electronics might require using grating gate structures and/or “plasmonic crystals implemented as 2D or 3D arrays of coherently operating plasmonic FETs.
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短通道场效应晶体管的弹道输运
短沟道Si mosfet和finfet的特征尺寸现在处于弹道或准弹道传输占主导地位的范围内。在这种情况下,传统的电子迁移率概念变得无效,电子在接触中而不是在器件通道中失去能量和动量。在这些器件中,电子惯性起着重要的作用,电子密度的振荡(称为等离子体振荡)使器件在太赫兹频率下响应。在太赫兹和次太赫兹频率下,电子惯性效应是弹道输运的特征,即使在特征尺寸为1微米的场效应管中也很明显。由于这些影响,器件阻抗成为频率的振荡函数。利用器件通道中电子密度振荡的等离子体波太赫兹探测器有望优于更传统的太赫兹探测器。图1显示了计算得到的硅MOSFET太赫兹探测器响应率与频率的关系。要充分发挥等离子体波电子学的潜力,可能需要使用光栅栅极结构和/或作为相干操作等离子体场效应管的二维或三维阵列的“等离子体晶体”。
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