CMOS-integrated digitally controlled DC-DC voltage converter with voltage and time configurations for on-chip high voltage MEMS switch actuation

Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004. Pub Date : 2004-12-06 DOI:10.1109/ICM.2004.1434216

M. Ghannam, I. Adly, H. Tilmans, W. De Raedt, R. Mertens

引用次数: 0

Abstract

In this work a digitally controlled dc-dc voltage converter circuit aimed at providing on-chip high voltage for MEMS switch actuation is developed. The chip including an analog voltage converter and a digital controller is fabricated in a 0.7 /spl mu/m CMOS high voltage/low voltage technology and occupies 11.84 mm/sup 2/ Si area. A maximum voltage of 32 V is attained in the realized prototype but higher levels are possible with modified converter designs. Multilevel driving voltage waveforms are demonstrated with successful configuration of the voltage level and time of selected intervals.

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集成了cmos的数字控制DC-DC电压转换器，具有用于片上高压MEMS开关驱动的电压和时间配置

本文设计了一种数字控制的dc-dc电压转换电路，旨在为MEMS开关驱动提供片上高压。该芯片包括模拟电压转换器和数字控制器，采用0.7 /spl μ m CMOS高/低压工艺制作，占地11.84 mm/sup 2/ Si。在实现的原型中获得了32 V的最大电压，但通过修改转换器设计可以达到更高的电压。演示了多电平驱动电压波形，并成功配置了所选间隔的电压电平和时间。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004.

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