{"title":"Research of physical properties of TiO2 nanolayers for integrated photonics applications","authors":"P. Struk, T. Pustelny","doi":"10.1117/12.2244141","DOIUrl":null,"url":null,"abstract":"The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.","PeriodicalId":101814,"journal":{"name":"Scientific Conference on Optical and Electronic Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scientific Conference on Optical and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2244141","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.
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