T. Sato, M. Iwanami, S. Hoshino, M. Kishi, M. Tsuchiya
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引用次数: 1
Abstract
Inversion method of Biot-Savart's law has been successfully applied to one-dimensional current profiling for /spl mu/m-class planar circuits. Indispensable is to use a fiber-edge magneto-optic probe of high spatial resolution and high DUT-accessibility.
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