J. Manceau, S. Bruyère, S. Jeannot, A. Sylvestre, P. Gonon
{"title":"Leakage current variation with time in Ta2O5 MIM and MIS capacitors","authors":"J. Manceau, S. Bruyère, S. Jeannot, A. Sylvestre, P. Gonon","doi":"10.1109/IRWS.2006.305226","DOIUrl":null,"url":null,"abstract":"In this paper Ta2O5 current instability in MIM and MIS capacitors is studied over several sample thicknesses with a current versus time measurement and a low frequency dielectric spectroscopy. Three types of phenomena is identified: polarization current (attributed to dielectric relaxation phenomena), conduction current (attributed to a Poole-Frenkel mechanism) and resistance degradation. This last one has been attributed to ionic diffusion in dielectric and follows the space-charge-limited (SCL) theory. According to physical characterization the origin of resistance degradation has been attributed to oxygen vacancies migration","PeriodicalId":199223,"journal":{"name":"2006 IEEE International Integrated Reliability Workshop Final Report","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Integrated Reliability Workshop Final Report","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.2006.305226","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14
Abstract
In this paper Ta2O5 current instability in MIM and MIS capacitors is studied over several sample thicknesses with a current versus time measurement and a low frequency dielectric spectroscopy. Three types of phenomena is identified: polarization current (attributed to dielectric relaxation phenomena), conduction current (attributed to a Poole-Frenkel mechanism) and resistance degradation. This last one has been attributed to ionic diffusion in dielectric and follows the space-charge-limited (SCL) theory. According to physical characterization the origin of resistance degradation has been attributed to oxygen vacancies migration
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