Size-dependent behavior of a MEMS microbeam under electrostatic actuation

Abstract

The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are derived from Hamilton’s principle, and they are transferred to a discretized form using a two-node beam element. Newton-Raphson based iterative procedure is used in conjunction with Newmark method to obtain the pull-in voltages and deflections of a clamped-clamped microbeam under electrostatic actuation. The influence of the axial force, applied voltage and material length scale parameter on the behavior of the beam is studied in detail and highlighted.