Tip emitter structures fabricated with using the scanning tunneling microscope

S. I. Shkuratov, I. Dorofeev, D.I. Volgunov, S. N. Shilimanov
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引用次数: 1

Abstract

Summary form only given, as follows. Results are presented of investigations of the fabrication processes of tip emitter structures using the scanning tunneling microscope (STM). Nanostructures were fabricated on the surface of multilayer thin film carbon/Me structures (Me: Cr, Fe, Ni, Mo). The number of layers was varied from 3 to 100. Nanotips were formed as a result of pulsed current action from the STM needle to the substrate: in a selected spot on the surface of the specimen the feedback of the STM servo system is interrupted and a voltage pulse several tens of nanoseconds wide is applied to the tunneling gap. After that using the same needle one can get an STM image of the tip emitter. The possibility is shown of fabricating tip emitter structures consisting of hundreds of nanotips. Factors influencing the nanotip parameters were investigated: residual gas atmosphere, pulsed action modes, characteristics of STM needle, materials of multilayer structures. The tip formation mechanism is discussed.
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用扫描隧道显微镜制作尖端发射极结构
仅给出摘要形式,如下。本文介绍了用扫描隧道显微镜(STM)研究尖端发射极结构制造工艺的结果。在多层碳/Me (Me: Cr, Fe, Ni, Mo)薄膜表面制备纳米结构。层数从3层到100层不等。由于STM针对衬底的脉冲电流作用,形成了纳米针尖:在试样表面选定的一个点上,中断STM伺服系统的反馈,并向隧道间隙施加几十纳秒宽的电压脉冲。之后,使用相同的针头可以得到尖端发射器的STM图像。指出了制造由数百个纳米尖端组成的尖端发射极结构的可能性。研究了影响纳米针尖参数的因素:残余气体气氛、脉冲作用模式、STM针尖特性、多层结构材料。讨论了尖端形成机理。
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