J. Munoz-Gamarra, E. Marigó, J. Giner, A. Uranga, F. Torres, N. Barniol
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引用次数: 5
Abstract
Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved.
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