L. Sambuco Salomone, O. Beldarrain, F. Campabadal, A. Faigón
{"title":"Quantized bands model for the determination of the dielectric constant of high-κ layers","authors":"L. Sambuco Salomone, O. Beldarrain, F. Campabadal, A. Faigón","doi":"10.1109/EAMTA.2015.7237377","DOIUrl":null,"url":null,"abstract":"A quantized bands model capable to generate capacitance-voltage (C-V) curves of MOS capacitors was implemented and numerical details are discussed. This model is applied to the extraction of the dielectric constant of Al2O3 layers with known physical thicknesses by fitting experimental results. A comparison with a continuum band model is presented.","PeriodicalId":101792,"journal":{"name":"2015 Argentine School of Micro-Nanoelectronics, Technology and Applications (EAMTA)","volume":"42 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Argentine School of Micro-Nanoelectronics, Technology and Applications (EAMTA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EAMTA.2015.7237377","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A quantized bands model capable to generate capacitance-voltage (C-V) curves of MOS capacitors was implemented and numerical details are discussed. This model is applied to the extraction of the dielectric constant of Al2O3 layers with known physical thicknesses by fitting experimental results. A comparison with a continuum band model is presented.
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