{"title":"Piezoelectric MEMS","authors":"T. T. Kobayashi (AIST)","doi":"10.1002/9783527823239.ch10","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":436477,"journal":{"name":"3D and Circuit Integration of MEMS","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"3D and Circuit Integration of MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/9783527823239.ch10","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
