A. Baracu, R. Müller, R. Voicu, A. Dinescu, M. Pustan, C. Bîrleanu
{"title":"Manufacture and Investigation of a Vertical MEMS Switch","authors":"A. Baracu, R. Müller, R. Voicu, A. Dinescu, M. Pustan, C. Bîrleanu","doi":"10.1109/SMICND.2018.8539774","DOIUrl":null,"url":null,"abstract":"This paper presents a switch with vertical movement, based on surface micromachining processes. The central thermal driving structure contains a suspended rectangular shape connected by 5 pairs of symmetric mobile beams. SEM investigations and COVENTOR simulations were performed in order to investigate the behavior of the switch.","PeriodicalId":247062,"journal":{"name":"2018 International Semiconductor Conference (CAS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2018.8539774","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
This paper presents a switch with vertical movement, based on surface micromachining processes. The central thermal driving structure contains a suspended rectangular shape connected by 5 pairs of symmetric mobile beams. SEM investigations and COVENTOR simulations were performed in order to investigate the behavior of the switch.
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