{"title":"Design Considerations for a \"Front End\" Illumination System for Soft X-ray Projection Lithography","authors":"N. Ceglio","doi":"10.1364/sxray.1992.mb1","DOIUrl":null,"url":null,"abstract":"We define the \"front-end\" or illumination system to include all those components necessary to produce the x-rays, and to transport them to and appropriately illuminate the mask. We will provide a systematic discussion of the constraints that limit the design of an illumination system for soft x-ray projection lithography.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1992.mb1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We define the "front-end" or illumination system to include all those components necessary to produce the x-rays, and to transport them to and appropriately illuminate the mask. We will provide a systematic discussion of the constraints that limit the design of an illumination system for soft x-ray projection lithography.
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