P. Paillet, J. Touron, J. Leray, C. Cirba, A. Michez
{"title":"Simulation of multi-level radiation-induced charge trapping and thermally activated phenomena in SiO/sub 2/","authors":"P. Paillet, J. Touron, J. Leray, C. Cirba, A. Michez","doi":"10.1109/RADECS.1997.698841","DOIUrl":null,"url":null,"abstract":"Charge trapping on several energy levels and thermally activated detrapping phenomena in SiO/sub 2/ have been determined by finite elements simulation. The results obtained agree well with experimental charge detrapping measurements, and enable the simulation of post-irradiation effects in Si/SiO/sub 2/ structures.","PeriodicalId":106774,"journal":{"name":"RADECS 97. Fourth European Conference on Radiation and its Effects on Components and Systems (Cat. No.97TH8294)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"23","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"RADECS 97. Fourth European Conference on Radiation and its Effects on Components and Systems (Cat. No.97TH8294)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RADECS.1997.698841","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 23
Abstract
Charge trapping on several energy levels and thermally activated detrapping phenomena in SiO/sub 2/ have been determined by finite elements simulation. The results obtained agree well with experimental charge detrapping measurements, and enable the simulation of post-irradiation effects in Si/SiO/sub 2/ structures.
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