T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, S. Buttgenbach
{"title":"Coordinate measurement on wafer level — From single sensors to sensor arrays","authors":"T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, S. Buttgenbach","doi":"10.1007/978-3-319-10948-0_19","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Seventh International Conference on Sensing Technology (ICST)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-319-10948-0_19","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
