First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Abstract

For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nano-gauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics.