Ultra miniature µ-accelerometer for wearable physical activity monitoring systems

R. Amarasinghe, D. Dao, S. Sugiyama
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引用次数: 1

Abstract

This study presents the design, fabrication and characterization of an ultra miniaturized 3-axis accelerometer with implanted piezoresistive sensing elements and read out circuits are having nano-scale dimensions. It has been developed using MEMS/NEMS machining and fabrication techniques. This sensor consists of a new sub-millimeter structure with seismic mass and combined cross-beam and surrounding beams. It can detect three components of linear acceleration simultaneously. The sensitivity could be enhanced significantly while miniaturizing the die size of sensor chip with aid of novel structure and nanoscale piezoresistors on the sensing beams. Therefore, this novel proposed sensor is showing good performance and smaller than other comparable miniaturized sensor structures reported thus far. The accelerometer is capable of measuring accelerations up to ±20g in the frequency bandwidth of 480Hz. Comparison of the obtained experimental results and finite element simulation shows good agreement. This accelerometer is being introduced for a wearable physical activity monitoring systems.
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用于可穿戴式身体活动监测系统的超微型微加速度计
本研究提出了一种具有纳米级尺寸的超小型三轴加速度计的设计、制造和表征,该加速度计具有植入式压阻传感元件和读出电路。它是采用MEMS/NEMS加工和制造技术开发的。该传感器是一种新型的亚毫米结构,具有地震质量,并结合了横梁和周围梁。它可以同时检测三个分量的线加速度。利用新型结构和传感光束上的纳米级压阻,可以在实现传感器芯片尺寸小型化的同时显著提高传感器的灵敏度。因此,这种新型传感器表现出良好的性能,并且比迄今为止报道的其他类似的小型化传感器结构更小。加速度计能够在480Hz的频率带宽中测量±20g的加速度。所得实验结果与有限元模拟结果比较,结果吻合较好。这种加速度计是为一种可穿戴的身体活动监测系统而推出的。
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