{"title":"Improving the thermodynamic stability and EUV reflectance in Mo/Si multilayer mirrors by rubidium incorporation (Conference Presentation)","authors":"A. Saedi, C. Sfiligoj, J. Frenken, J. Verhoeven","doi":"10.1117/12.2321181","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":379428,"journal":{"name":"Advances in X-Ray/EUV Optics and Components XIII","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in X-Ray/EUV Optics and Components XIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2321181","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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