Comparative analysis of methods for calibration of aShack-Hartmann wavefront sensor

Abstract

This paper is devoted to a comparative analysis of the methods for calibrating the Shack-Hartmann wavefront sensor: on the plane wavefront (calibration by turning the sensor) and spherical wavefront (absolute calibration). For comparison, a gen-eral analysis of the advantages and disadvantages of calibration methods was carried out, including the creation of a reference wavefront and the determination of the ex-act geometric parameters of the sensor. The geometric parameters of the Shack-Hartmann wavefront sensor are used in the reconstruction of the measured wave-front and determine such parameters of the Shack-Hartmann sensor as the dynamic range and sensitivity. Also, for numerical comparison, an analysis of the errors of the dynamic range, determined by aberrations such as tilt and defocus, was carried out, and the dependences of these errors on the error of the geometric parameters of the sensor were constructed.