Design, modelling and characterization of transmission lines for mm-wave silicon ICs

J. Leufker, D. Fritsche, G. Tretter, M. Khafaji, C. Carta, F. Ellinger
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引用次数: 4

Abstract

This paper describes the design, modelling and characterization of transmission lines for millimetre wave silicon integrated circuits up to 65 GHz. The simulation results of three different EM simulators for a selected hybrid coplanar layout structure are presented. Two different deembedding methods are investigated and compared with respect to sensitivity to typical measurement errors. Finally both methods are applied to the measurement results of the fabricated test structures in a 250 nm BiCMOS technology showing good agreement to EM simulations and predicted sensitivity to measurement errors.
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毫米波硅集成电路传输线的设计、建模和表征
本文介绍了65 GHz毫米波硅集成电路传输线的设计、建模和特性。给出了三种不同的仿真器对选定的混合共面布局结构的仿真结果。研究了两种不同的去嵌入方法,并比较了它们对典型测量误差的灵敏度。最后,将这两种方法应用于250 nm BiCMOS技术制备的测试结构的测量结果,结果与EM模拟结果吻合良好,并预测了测量误差的灵敏度。
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