{"title":"Field evaporation of tungsten silicides microprotrusions","authors":"M. V. Loginov, V.N. Shrednik","doi":"10.1109/IVMC.1996.601867","DOIUrl":null,"url":null,"abstract":"The chemical composition of thermo-field microprotrusions, growing on the central top {110}-plane of W-tip, coated with some monoatomic layers of Si, has been studied by time of flight atom probe. It has been shown that the upper monoatomic layer of the protrusion is formed by WSi/sub 2/, and the bulk composition corresponds to WSi/sub 3/.","PeriodicalId":384104,"journal":{"name":"9th International Vacuum Microelectronics Conference","volume":"293 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"9th International Vacuum Microelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVMC.1996.601867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The chemical composition of thermo-field microprotrusions, growing on the central top {110}-plane of W-tip, coated with some monoatomic layers of Si, has been studied by time of flight atom probe. It has been shown that the upper monoatomic layer of the protrusion is formed by WSi/sub 2/, and the bulk composition corresponds to WSi/sub 3/.
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