G. Putrino, M. Martyniuk, A. Keating, L. Faraone, J. Dell
{"title":"Demonstration of a method for detecting MEMS suspended beam height","authors":"G. Putrino, M. Martyniuk, A. Keating, L. Faraone, J. Dell","doi":"10.1109/OMEMS.2012.6318817","DOIUrl":null,"url":null,"abstract":"An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318817","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.
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