Characteristics of layer-by-layer ZnO nanoparticles thin films prepared with different deposition layer

S. S. Shariffudin, M. H. Mamat, S. H. Herman, M. Rusop
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引用次数: 5

Abstract

Layer-by-layer ZnO nanoparticles thin films were deposited using sol-gel spin coating technique. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used in the ZnO solution. Different numbers of film layers were employed to study their effects to the physical, electrical and optical properties of the thin films. XRD patterns showed that the films were single crystalline with highly c-axis orientation for films with higher numbers of deposition layers. Morphology studies revealed that the grain sizes increased with the number of layers. Resistivity of the film decreased with the increased number of layers with minimum value of 15.5 Ω.cm given by 6 layers film. The PL spectra exhibit highest UV emission for 6 layers film due to high crystalline quality of the thin film.
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不同沉积层制备ZnO纳米颗粒薄膜的特性
采用溶胶-凝胶自旋镀膜技术,逐层沉积ZnO纳米颗粒薄膜。氧化锌溶液采用二水合乙酸锌、2-甲氧基乙醇和单乙醇胺。采用不同的薄膜层数研究了它们对薄膜物理、电学和光学性能的影响。XRD分析结果表明,沉积层数较多的薄膜为单晶,具有较高的c轴取向。形貌研究表明,晶粒尺寸随层数的增加而增大。膜的电阻率随层数的增加而降低,最小值为15.5 Ω。Cm由6层薄膜给出。由于薄膜的高结晶质量,6层薄膜的PL光谱显示出最高的紫外发射。
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