A joint industry-university CIM project for university microelectronics manufacturing

L. Fuller, C. Karacal, T. Vandenbosch, Steve Slagsvol, M. Poponiak
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引用次数: 8

Abstract

A student-operated factory for manufacturing integrated circuits has been in operation at the Rochester Institute of Technology (RIT) since 1987. In 1989 RIT and IBM joined together to improve the factory operation by installing a computer-integrated manufacturing (CIM) system. The CIM system allows users control equipment access, monitor equipment status, do lot tracking, provide detailed current operator instructions, provide a paperless manufacturing environment, do scheduling, do manual input and auto input data collection, do statistical process control, do materials planning, download recipes to equipment, and realize feedback and feedforward control. Reports are routinely generated. The project is mostly completed and has proven to be successful in reducing cycle time, improving manufacturing flexibility, and increasing the quality of the devices manufactured at RIT.<>
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大学微电子制造的产学研联合CIM项目
罗彻斯特理工学院(RIT)自1987年以来一直在运营一家由学生运营的集成电路制造工厂。1989年,RIT和IBM联合起来,通过安装计算机集成制造(CIM)系统来改进工厂操作。CIM系统允许用户控制设备访问,监控设备状态,进行批次跟踪,提供详细的当前操作员指令,提供无纸化制造环境,进行调度,进行人工输入和自动输入数据收集,进行统计过程控制,进行物料计划,将配方下载到设备,并实现反馈和前馈控制。报告是例行生成的。该项目已基本完成,并已被证明在缩短周期时间、提高制造灵活性和提高RIT制造的设备质量方面取得了成功。
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