Wenjun Zhang, Peng-Fei Nan, B. Lu, Yifang Chen, P. Vadgama, X. Qu
{"title":"Silver surface-enhanced raman scattering substrates prepared by a nanofabrication process using Electron Beam Lithography and magnetron sputtering","authors":"Wenjun Zhang, Peng-Fei Nan, B. Lu, Yifang Chen, P. Vadgama, X. Qu","doi":"10.1109/NANO.2013.6720912","DOIUrl":null,"url":null,"abstract":"The tunable silver nano-pillar arrays were fabricated by using Electron Beam Lithography and direct current magnetron sputtering technique successfully. The as-prepared substrates retain an excellent Raman-enhancement characteristic. The developed process provides a reproducible and reliable method to fabricate the Surface-enhanced Raman Scattering substrate particularly for the high sensitivity biological detections.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2013.6720912","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The tunable silver nano-pillar arrays were fabricated by using Electron Beam Lithography and direct current magnetron sputtering technique successfully. The as-prepared substrates retain an excellent Raman-enhancement characteristic. The developed process provides a reproducible and reliable method to fabricate the Surface-enhanced Raman Scattering substrate particularly for the high sensitivity biological detections.
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