V. V. Gudzev, V. Litvinov, V. G. Mishustin, A. D. Maslov, M. Zubkov
{"title":"Experimental equipment to investigate deep energy levels in semiconductor barrier structures with high leakage current","authors":"V. V. Gudzev, V. Litvinov, V. G. Mishustin, A. D. Maslov, M. Zubkov","doi":"10.1109/ELEKTRO49696.2020.9130257","DOIUrl":null,"url":null,"abstract":"In this paper we present description of the developed current DLTS spectrometer to investigate deep energy levels in barrier structures based on crystalline and non-crystalline semiconductors with large rectifying junction area and high leakage currents. This modified equipment allows to define DL parameters such as ionization energy, cross section and concentration in the wide temperature range 7…500К, relaxation time range 10 μs…10 s, maximum barrier capacitance till 2000 pF, relaxation current amplitude range 10 pА…10 mА.","PeriodicalId":165069,"journal":{"name":"2020 ELEKTRO","volume":"225 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 ELEKTRO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELEKTRO49696.2020.9130257","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper we present description of the developed current DLTS spectrometer to investigate deep energy levels in barrier structures based on crystalline and non-crystalline semiconductors with large rectifying junction area and high leakage currents. This modified equipment allows to define DL parameters such as ionization energy, cross section and concentration in the wide temperature range 7…500К, relaxation time range 10 μs…10 s, maximum barrier capacitance till 2000 pF, relaxation current amplitude range 10 pА…10 mА.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
