E. Oilier, L. Duraffourg, M. Delaye, S. Deneuville, V. Nguyen, P. Andreucci, H. Grange, P. Robert, F. Marchi, R. Dianoux, T. Baron
{"title":"Thin SQI NEMS accelerometers compatible with In-IC integration","authors":"E. Oilier, L. Duraffourg, M. Delaye, S. Deneuville, V. Nguyen, P. Andreucci, H. Grange, P. Robert, F. Marchi, R. Dianoux, T. Baron","doi":"10.1109/ICSENS.2007.355716","DOIUrl":null,"url":null,"abstract":"The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with \"In-IC\" integration. The goal of this work is to demonstrate the feasibility in terms of concept and technological manufacturing. Modeling of Casimir force, development of hybrid e-beam/DUV lithography and FH-vapor release, specific AFM characterizations have allowed to design, fabricate and characterize first devices.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"23 9","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355716","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "In-IC" integration. The goal of this work is to demonstrate the feasibility in terms of concept and technological manufacturing. Modeling of Casimir force, development of hybrid e-beam/DUV lithography and FH-vapor release, specific AFM characterizations have allowed to design, fabricate and characterize first devices.
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