Pub Date : 2006-12-01DOI: 10.1109/ICSENS.2007.355742
Nan-Fu Chiu, Yang-Hung Liang, Chii-Wann Lin
In the paper, we report a novel biomolecular finger printing method with an active dual-band micro-coplanar inverted F antenna biosensor (DMCPIFA-Bio) on printed circuit board. The purpose of this research is to use the frequency band of microwave to characterize the responses of different biomolecules and concentrations. We used a dual-band antenna of 3 and 7 GHz frequency band as the active source and the spectral responses of probed molecules can be used for finger printing purpose. The preliminary result shows the relationship between conditions of biomolecules and the parameter of impedance, dB(S(l,l)) and phase. From analysis result, we found that the change of the concentration and total impedance value have better linear relationship. In additions, there are other parameters like initial analysis dB(S(l,l)) and change of frequency which may have high correlation to biomolecular weight size.
{"title":"Novel Biomolecular Finger Printing with an Active Dual-Band Antenna Biosensor","authors":"Nan-Fu Chiu, Yang-Hung Liang, Chii-Wann Lin","doi":"10.1109/ICSENS.2007.355742","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355742","url":null,"abstract":"In the paper, we report a novel biomolecular finger printing method with an active dual-band micro-coplanar inverted F antenna biosensor (DMCPIFA-Bio) on printed circuit board. The purpose of this research is to use the frequency band of microwave to characterize the responses of different biomolecules and concentrations. We used a dual-band antenna of 3 and 7 GHz frequency band as the active source and the spectral responses of probed molecules can be used for finger printing purpose. The preliminary result shows the relationship between conditions of biomolecules and the parameter of impedance, dB(S(l,l)) and phase. From analysis result, we found that the change of the concentration and total impedance value have better linear relationship. In additions, there are other parameters like initial analysis dB(S(l,l)) and change of frequency which may have high correlation to biomolecular weight size.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128945465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-12-01DOI: 10.1109/ICSENS.2007.355530
J. Engel, N. Chen, C. Tucker, Chang Liu, Sung-Hoon Kim, D. Jones
This work presents results towards realizing a flexible multimodal tactile sensing system for object identification. Using polymer substrates and simple fabrication, robust devices are made that can identify objects based on texture, temperature, as well as material properties such as hardness and thermal conductivity. These capabilities are possible using signal processing techniques and physical models along with individual sensing structures inspired by the specialization found in biological skin. These structures are used to sense various object parameters, and array-wide processing to identify texture using a Maximum Likelihood decision rule. 80% texture classification is achieved. In blind object identification tests, over 90% correct identification was achieved by measurement of material properties.
{"title":"Flexible Multimodal Tactile Sensing System for Object Identification","authors":"J. Engel, N. Chen, C. Tucker, Chang Liu, Sung-Hoon Kim, D. Jones","doi":"10.1109/ICSENS.2007.355530","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355530","url":null,"abstract":"This work presents results towards realizing a flexible multimodal tactile sensing system for object identification. Using polymer substrates and simple fabrication, robust devices are made that can identify objects based on texture, temperature, as well as material properties such as hardness and thermal conductivity. These capabilities are possible using signal processing techniques and physical models along with individual sensing structures inspired by the specialization found in biological skin. These structures are used to sense various object parameters, and array-wide processing to identify texture using a Maximum Likelihood decision rule. 80% texture classification is achieved. In blind object identification tests, over 90% correct identification was achieved by measurement of material properties.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"211 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129701263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-12-01DOI: 10.1109/ICSENS.2007.355534
Y. Park, M. Andringa, D. Neikirk, H. S. Hewage, E. Anslyn
A photodiode, integrated into a micromachined silicon pyramidal cavity for the purpose of detecting bead-based chemiluminescent reactions has been devised and fabricated. A large amount of previous work on the optical detection of chemical/biological reactions has concentrated on either improving the signal processing capabilities of planar, imager-like, detectors or developing a dedicated detector for sensing one specific phenomenon at a time. In our platform photodiodes are designed to be directly integrated into micromachined cavities in an array, reminiscent of a microplate, which potentially enables multi-analyte capabilities. Additionally, a concept of accessing a photodiode using inductive coupling, i.e. using a non-contact wireless reading, is introduced and demonstrated.
{"title":"Smart microplates: integrated photodiodes for detecting bead-based chemiluminescent reactions","authors":"Y. Park, M. Andringa, D. Neikirk, H. S. Hewage, E. Anslyn","doi":"10.1109/ICSENS.2007.355534","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355534","url":null,"abstract":"A photodiode, integrated into a micromachined silicon pyramidal cavity for the purpose of detecting bead-based chemiluminescent reactions has been devised and fabricated. A large amount of previous work on the optical detection of chemical/biological reactions has concentrated on either improving the signal processing capabilities of planar, imager-like, detectors or developing a dedicated detector for sensing one specific phenomenon at a time. In our platform photodiodes are designed to be directly integrated into micromachined cavities in an array, reminiscent of a microplate, which potentially enables multi-analyte capabilities. Additionally, a concept of accessing a photodiode using inductive coupling, i.e. using a non-contact wireless reading, is introduced and demonstrated.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"15 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123208659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-22DOI: 10.1109/ICSENS.2007.355610
F. Koushanfar, N. Kiyavash, M. Potkonjak
Missing data is unavoidable in sensor networks due to sensor faults, communication malfunctioning and malicious attacks. There is a very little insight in missing data causes and statistical and pattern properties of missing data in collected data streams. To address this problem, we utilize interacting-particle model that takes into account both patterns of missing data at individual sensor data streams as well as the correlation between occurrence of missing data at other sensor data streams. The model can be used in algorithms and protocols for energy efficient data collection and other tasks in presence of missing data. We use statistical intersensor models for predicting the readings of different sensors. As a driver application, we address the problem of energy efficient sensing by adaptively coordinating the sleep schedules of sensor nodes while we guarantee that values of nodes in the sleep mode can be recovered from the awake nodes within a user's specified error bound and probability of missing data at awake nodes is less than a given threshold. The sleeping coordination is addressed by creating the maximal number of subgroups of disjoint nodes, each of whose data is sufficient to recover the data of the entire network in presence of missing data. On simulated and actually collected data for temperature and humidity sensors in Intel Berkeley Lab, we show that by using sleeping coordination that considers missing data, we reduce the typical 40% missing data rate of traditional sleeping techniques to less than 7%.
{"title":"Interacting Particle-Based Model for Missing Data in Sensor Networks: Foundations and Applications","authors":"F. Koushanfar, N. Kiyavash, M. Potkonjak","doi":"10.1109/ICSENS.2007.355610","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355610","url":null,"abstract":"Missing data is unavoidable in sensor networks due to sensor faults, communication malfunctioning and malicious attacks. There is a very little insight in missing data causes and statistical and pattern properties of missing data in collected data streams. To address this problem, we utilize interacting-particle model that takes into account both patterns of missing data at individual sensor data streams as well as the correlation between occurrence of missing data at other sensor data streams. The model can be used in algorithms and protocols for energy efficient data collection and other tasks in presence of missing data. We use statistical intersensor models for predicting the readings of different sensors. As a driver application, we address the problem of energy efficient sensing by adaptively coordinating the sleep schedules of sensor nodes while we guarantee that values of nodes in the sleep mode can be recovered from the awake nodes within a user's specified error bound and probability of missing data at awake nodes is less than a given threshold. The sleeping coordination is addressed by creating the maximal number of subgroups of disjoint nodes, each of whose data is sufficient to recover the data of the entire network in presence of missing data. On simulated and actually collected data for temperature and humidity sensors in Intel Berkeley Lab, we show that by using sleeping coordination that considers missing data, we reduce the typical 40% missing data rate of traditional sleeping techniques to less than 7%.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131282133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-22DOI: 10.1109/ICSENS.2007.355716
E. Oilier, L. Duraffourg, M. Delaye, S. Deneuville, V. Nguyen, P. Andreucci, H. Grange, P. Robert, F. Marchi, R. Dianoux, T. Baron
The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "In-IC" integration. The goal of this work is to demonstrate the feasibility in terms of concept and technological manufacturing. Modeling of Casimir force, development of hybrid e-beam/DUV lithography and FH-vapor release, specific AFM characterizations have allowed to design, fabricate and characterize first devices.
{"title":"Thin SQI NEMS accelerometers compatible with In-IC integration","authors":"E. Oilier, L. Duraffourg, M. Delaye, S. Deneuville, V. Nguyen, P. Andreucci, H. Grange, P. Robert, F. Marchi, R. Dianoux, T. Baron","doi":"10.1109/ICSENS.2007.355716","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355716","url":null,"abstract":"The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with \"In-IC\" integration. The goal of this work is to demonstrate the feasibility in terms of concept and technological manufacturing. Modeling of Casimir force, development of hybrid e-beam/DUV lithography and FH-vapor release, specific AFM characterizations have allowed to design, fabricate and characterize first devices.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"23 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132501382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-22DOI: 10.1109/ICSENS.2007.355509
A. Girard, F. Bendriaa, O. de Sagazan, M. Harnois, F. le Bihan, A. Salaun, T. Mohammed‐Brahim, P. Brissot, O. Loréal
Field effect transistor (FET) structure with suspended bridge shows the ability to detect proteins with very high sensitivity. This sensor is tested for the transferrin, a specific blood plasma protein, relevant in iron disease diagnostic. This system is based on field effect transistor with a suspended bridge used as a gate electrode. The sensitive layer is made of silicon nitride as in the ISFET (ion sensitive field effect transistor) technology. The surface micro-technology ensures a small height suspended-bridge (0.5 mum) composed of poly-silicon insulated with silicon nitride. To improve sensitivity and to limit biofouling, proteins are selected by antibodies covalently bound to organic layers. The specific charge of the fixed transferrins translates the transistor transfer characteristics. For low concentration, resulting shift is important and confers a good sensitivity to our electronic transducer.
{"title":"Transferrin Electronic Detector for Iron Disease Diagnostics","authors":"A. Girard, F. Bendriaa, O. de Sagazan, M. Harnois, F. le Bihan, A. Salaun, T. Mohammed‐Brahim, P. Brissot, O. Loréal","doi":"10.1109/ICSENS.2007.355509","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355509","url":null,"abstract":"Field effect transistor (FET) structure with suspended bridge shows the ability to detect proteins with very high sensitivity. This sensor is tested for the transferrin, a specific blood plasma protein, relevant in iron disease diagnostic. This system is based on field effect transistor with a suspended bridge used as a gate electrode. The sensitive layer is made of silicon nitride as in the ISFET (ion sensitive field effect transistor) technology. The surface micro-technology ensures a small height suspended-bridge (0.5 mum) composed of poly-silicon insulated with silicon nitride. To improve sensitivity and to limit biofouling, proteins are selected by antibodies covalently bound to organic layers. The specific charge of the fixed transferrins translates the transistor transfer characteristics. For low concentration, resulting shift is important and confers a good sensitivity to our electronic transducer.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"400 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122785021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-22DOI: 10.1109/ICSENS.2007.355584
J. Wong, S. Megerian, M. Potkonjak
Efficient and complete data collection is one of the most important tasks in wireless ad-hoc sensor networks. Additionally, the collection of the full data set should be performed in the most resource efficient way, thus prolonging the battery lifetime of the network. We introduce a new approach for energy efficient data collection through the use of staggered sampling. Staggered sampling means that at each sampling moment (epoch) only a small percentage of sensors collect (sample) data. The proposed approach leverages on statistical relationships between samples taken from different sensors and/or at different epochs for the prediction of the non-sampled sensor data. The main goal of the approach is to ensure complete collection of data during a periodic cycle while minimizing the number of sensor readings collected at any point in time. Complete data collection is confirmed by ensuring that each sensor is either sampled at each epoch or the data sample can be accurately recovered though model prediction of the sampled sensors. The proposed approach consists of two main phases. First, efficient modeling of the prediction relationship between two sensors using kernel smoothing over different time lags is performed. Second, the selection of epochs at which each sensor is to sample the data is determined. A 0-1 integer linear programming formulation is used to address this NP-complete assignment problem optimally on relatively large instances. We demonstrate the effectiveness of the approach on traces from actually deployed networks for sensor of two modalities: temperature and humidity.
{"title":"Staggered Sampling for Energy Efficient Data Collection","authors":"J. Wong, S. Megerian, M. Potkonjak","doi":"10.1109/ICSENS.2007.355584","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355584","url":null,"abstract":"Efficient and complete data collection is one of the most important tasks in wireless ad-hoc sensor networks. Additionally, the collection of the full data set should be performed in the most resource efficient way, thus prolonging the battery lifetime of the network. We introduce a new approach for energy efficient data collection through the use of staggered sampling. Staggered sampling means that at each sampling moment (epoch) only a small percentage of sensors collect (sample) data. The proposed approach leverages on statistical relationships between samples taken from different sensors and/or at different epochs for the prediction of the non-sampled sensor data. The main goal of the approach is to ensure complete collection of data during a periodic cycle while minimizing the number of sensor readings collected at any point in time. Complete data collection is confirmed by ensuring that each sensor is either sampled at each epoch or the data sample can be accurately recovered though model prediction of the sampled sensors. The proposed approach consists of two main phases. First, efficient modeling of the prediction relationship between two sensors using kernel smoothing over different time lags is performed. Second, the selection of epochs at which each sensor is to sample the data is determined. A 0-1 integer linear programming formulation is used to address this NP-complete assignment problem optimally on relatively large instances. We demonstrate the effectiveness of the approach on traces from actually deployed networks for sensor of two modalities: temperature and humidity.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128031143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355875
H. Natsuhara, T. Katsuno, X. Chen, S. Yang, S. Motojima, M. Takaki, T. Kuzuya, K. Kawabe
The tactile and proximity sensing properties of CMC/silicone composites were studied by evaluating with the impedance Z as a function of CMC content in matrix. The optimum CMC content as proximity sensor element was 3 wt%, while the tactile sensor properties were increased in intensity with CMC content (over 7 wt%). The CMC sensor element with surface size of 300 times 300 mm and with a CMC content of 3 wt% is able to detect the existence of a human palm that is about 30 cm away from CMC sensor element. Furthermore, the dramatic change of impedance Z was observed at just contact. We succeeded in the preparation of CMC sensor element with tactile and proximity sensing property.
通过阻抗Z与基体中CMC含量的关系，研究了CMC/硅酮复合材料的触觉和接近传感性能。CMC作为接近传感器元件的最佳含量为3 wt%，而触觉传感器的性能随CMC含量的增加而增强(超过7 wt%)。CMC传感器元件的表面尺寸为300 × 300 mm, CMC含量为3wt %，能够检测到距离CMC传感器元件约30 cm的人手掌的存在。此外，在刚接触时观察到阻抗Z的剧烈变化。我们成功地制备了具有触觉和接近传感特性的CMC传感器元件。
{"title":"Multifunctional CMC/silicone composite sensor elements as the tactile and proximity sensors","authors":"H. Natsuhara, T. Katsuno, X. Chen, S. Yang, S. Motojima, M. Takaki, T. Kuzuya, K. Kawabe","doi":"10.1109/ICSENS.2007.355875","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355875","url":null,"abstract":"The tactile and proximity sensing properties of CMC/silicone composites were studied by evaluating with the impedance Z as a function of CMC content in matrix. The optimum CMC content as proximity sensor element was 3 wt%, while the tactile sensor properties were increased in intensity with CMC content (over 7 wt%). The CMC sensor element with surface size of 300 times 300 mm and with a CMC content of 3 wt% is able to detect the existence of a human palm that is about 30 cm away from CMC sensor element. Furthermore, the dramatic change of impedance Z was observed at just contact. We succeeded in the preparation of CMC sensor element with tactile and proximity sensing property.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115619369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355712
M.S.-C. Lu, Chi-En Lu, Zhong-Hong Wu, Chun‐Fu Chen, Shi-Yu Huang, Y. King
This paper presents the design, fabrication, and characterization of CMOS micromachined grippers with on-chip optical detection. The CMOS MEMS fabrication features a combination of metal wet etch and sacrificial polysilicon etch for structural release. The fabricated microstructure contains metal and dielectric layers, plus a polysilicon heater for electrothermal actuation. Optical detection is provided by the photo detectors placed beneath the gripping sites. Dynamic characterization of a 200 mum-long microgripper shows a measured thermal time constant of 53 mus. For an applied power of 6 mW, one arm of the gripper produces a 3.6-mum in-plane displacement and a 1.6-mum out-of-plane displacement. The corresponding maximum heater temperature is 220degC, while the temperature elevation at the tip is only 28degC. The measured sensitivity and dynamic range of the photo detector are 1.42 V/lux-sec and 48.5 dB, respectively.
{"title":"A CMOS Micromachined Gripper Array with On-Chip Optical Detection","authors":"M.S.-C. Lu, Chi-En Lu, Zhong-Hong Wu, Chun‐Fu Chen, Shi-Yu Huang, Y. King","doi":"10.1109/ICSENS.2007.355712","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355712","url":null,"abstract":"This paper presents the design, fabrication, and characterization of CMOS micromachined grippers with on-chip optical detection. The CMOS MEMS fabrication features a combination of metal wet etch and sacrificial polysilicon etch for structural release. The fabricated microstructure contains metal and dielectric layers, plus a polysilicon heater for electrothermal actuation. Optical detection is provided by the photo detectors placed beneath the gripping sites. Dynamic characterization of a 200 mum-long microgripper shows a measured thermal time constant of 53 mus. For an applied power of 6 mW, one arm of the gripper produces a 3.6-mum in-plane displacement and a 1.6-mum out-of-plane displacement. The corresponding maximum heater temperature is 220degC, while the temperature elevation at the tip is only 28degC. The measured sensitivity and dynamic range of the photo detector are 1.42 V/lux-sec and 48.5 dB, respectively.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124462532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355563
K. Schjølberg-Henriksen, A. Ferber, S. Moe, D.T. Wang, R. W. Bernstein, H. Rogne, O. Schulz, G. Muller, M. Lloyd, Karl-Heinz Suphan
Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. 12 prototypes for measuring CO2 have been characterised. Detection limits ranging from 92 ppm to below 6 ppm CO2 were obtained, depending on the measurement time and photo acoustic cell design. No cross-sensitivity towards CO, CH4, or humidity could be observed in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO2 in the range from 25degC to 50degC.
{"title":"Sensitive and Selective Photo Acoustic Gas Sensor Suitable for High Volume Manufacturing","authors":"K. Schjølberg-Henriksen, A. Ferber, S. Moe, D.T. Wang, R. W. Bernstein, H. Rogne, O. Schulz, G. Muller, M. Lloyd, Karl-Heinz Suphan","doi":"10.1109/ICSENS.2007.355563","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355563","url":null,"abstract":"Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. 12 prototypes for measuring CO2 have been characterised. Detection limits ranging from 92 ppm to below 6 ppm CO2 were obtained, depending on the measurement time and photo acoustic cell design. No cross-sensitivity towards CO, CH4, or humidity could be observed in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO2 in the range from 25degC to 50degC.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121807229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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