{"title":"Fabrication of continuous-relief micro-optics: progress in laser writing and replication technology","authors":"M. T. Gale, T. Hessler, R. Kunz, H. Teichmann","doi":"10.1364/domo.1996.dtha.2","DOIUrl":null,"url":null,"abstract":"Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.","PeriodicalId":301804,"journal":{"name":"Diffractive Optics and Micro-Optics","volume":"316 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Diffractive Optics and Micro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/domo.1996.dtha.2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
