{"title":"Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits","authors":"M. Schicke, K. Schuster","doi":"10.1109/WOLTE.2002.1022477","DOIUrl":null,"url":null,"abstract":"Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (< 150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.","PeriodicalId":338080,"journal":{"name":"Proceedings of the 5th European Workshop on Low Temperature Electronics","volume":"302 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 5th European Workshop on Low Temperature Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WOLTE.2002.1022477","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (< 150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.
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