{"title":"Parameters estimation of the MEM transducer with electrodes produced from different materials","authors":"V. Dragunov, M. N. Lyutaeva","doi":"10.1109/INTERNANO.2009.5335625","DOIUrl":null,"url":null,"abstract":"The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.","PeriodicalId":376370,"journal":{"name":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTERNANO.2009.5335625","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.
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