S. Heinsalu, Y. Isogai, Y. Matsushima, H. Ishikawa, K. Utaka
{"title":"Design and record-high experimental demonstration of compact and high-sensitive SW-MS BG refractive index sensor on SOI platform","authors":"S. Heinsalu, Y. Isogai, Y. Matsushima, H. Ishikawa, K. Utaka","doi":"10.1109/OECC48412.2020.9273622","DOIUrl":null,"url":null,"abstract":"Sub-wavelength multi-slot Bragg grating (SW-MS BG) waveguide sensors were developed. The structures were designed for compactness and high sensitivity. The fabricated device demonstrated a record-high sensitivity of 730 nm/RIU with a length of 9.5 µm.","PeriodicalId":433309,"journal":{"name":"2020 Opto-Electronics and Communications Conference (OECC)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Opto-Electronics and Communications Conference (OECC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OECC48412.2020.9273622","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Sub-wavelength multi-slot Bragg grating (SW-MS BG) waveguide sensors were developed. The structures were designed for compactness and high sensitivity. The fabricated device demonstrated a record-high sensitivity of 730 nm/RIU with a length of 9.5 µm.