Design and record-high experimental demonstration of compact and high-sensitive SW-MS BG refractive index sensor on SOI platform

S. Heinsalu, Y. Isogai, Y. Matsushima, H. Ishikawa, K. Utaka
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Abstract

Sub-wavelength multi-slot Bragg grating (SW-MS BG) waveguide sensors were developed. The structures were designed for compactness and high sensitivity. The fabricated device demonstrated a record-high sensitivity of 730 nm/RIU with a length of 9.5 µm.
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基于SOI平台的小型高灵敏度SW-MS BG折射率传感器设计及创记录实验演示
研制了亚波长多槽布拉格光栅(SW-MS BG)波导传感器。结构紧凑,灵敏度高。该器件的灵敏度达到730 nm/RIU,长度为9.5µm。
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