S. Schmucker, E. Frederick, Q. Campbell, J. Ivie, E. Anderson, K. Dwyer, A. Baczewski, George Wang, R. Butera, S. Misra
{"title":"Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition.","authors":"S. Schmucker, E. Frederick, Q. Campbell, J. Ivie, E. Anderson, K. Dwyer, A. Baczewski, George Wang, R. Butera, S. Misra","doi":"10.2172/1877517","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":256346,"journal":{"name":"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,","volume":"4 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2172/1877517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}