Electrical characterization of MOSIS-fabricated circuit elements

C. M. Stillo, R. Fox, D. Langford, D. J. Ferris
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Abstract

SPICE parameters and other data useful for analog design were determined for the MOSIS 2 mu m-double-metal double-poly p-well process. The channel-length modulation parameter LAMBDA and noise parameter KF were extracted for various sizes of n- and p-type MOSFETs with poly1 and poly2 gates. the zero-bias threshold voltage, bulk threshold parameters, saturation transconductance, lateral diffusion, and width correction of poly2 transistors were extracted. A vertical bipolar transistor is characterized.<>
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mosis制造电路元件的电学特性
确定了MOSIS 2 μ m-双金属双聚p-井工艺的SPICE参数和其他对模拟设计有用的数据。分别提取了不同尺寸的n型和p型mosfet (poly1和poly2栅极)的通道长度调制参数LAMBDA和噪声参数KF。提取了零偏阈值电压、体积阈值参数、饱和跨导、横向扩散和宽度校正。描述了一种垂直双极晶体管。
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Cooperative research and technology transfer A novel method of forming a thin single crystal silicon diaphragm with precise thickness for potential use in fabricating micromechanical sensors using merged epitaxial lateral overgrowth A DC model for the HEMT including the effect of parasitic conduction A subthreshold model for the analysis of MOS IC's University/government/industry program in analog/digital integrated circuits
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