{"title":"Pyrolytic deposition of metal films on substrates in conditions of the open atmosphere initiated by nanosecond laser irradiation","authors":"D. V. Chesnokov, V. V. Chesnokov","doi":"10.1109/APEIE.2000.913085","DOIUrl":null,"url":null,"abstract":"The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.","PeriodicalId":184476,"journal":{"name":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APEIE.2000.913085","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.
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