R. Dylewicz, S. Patela, R. Paszkiewicz, M. Tlaczala, S. Bartkiewicz, A. Miniewicz
{"title":"Holographic lithography for grating coupler fabrication in gallium nitride grown on sapphire substrate","authors":"R. Dylewicz, S. Patela, R. Paszkiewicz, M. Tlaczala, S. Bartkiewicz, A. Miniewicz","doi":"10.1109/STYSW.2005.1617790","DOIUrl":null,"url":null,"abstract":"The paper reports on holographic lithography for fabrication of grating coupler in gallium nitride grown on sapphire substrate. The impact of the speckle effect is especially significant when further etching process is taken into consideration","PeriodicalId":351138,"journal":{"name":"Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005.","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STYSW.2005.1617790","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The paper reports on holographic lithography for fabrication of grating coupler in gallium nitride grown on sapphire substrate. The impact of the speckle effect is especially significant when further etching process is taken into consideration
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