Micromachined Silicon Resonators

Abstract

Miniature electromechanical resonators can be fabricated with manufacturing techniques similar to those used for integrated electronics. These "solid state" resonators have been successfully tested with frequencies from 10 Khz to more than 500 Mhz and with Q's greater than 500,000. The design and fabrication of miniature resonators made from single crystal silicon, polycrystalline silicon, and from multilayer silicon membranes are reviewed. The operating characteristics of these resonators are surveyed and potential applications in several areas are presented.