A. Manninen, P. Helisto, H. Sipola, L. Roschier, I. Iisakka, P. Immonen
{"title":"Null detector and AC voltage reference based on MEMS","authors":"A. Manninen, P. Helisto, H. Sipola, L. Roschier, I. Iisakka, P. Immonen","doi":"10.1109/CPEM.2014.6898440","DOIUrl":null,"url":null,"abstract":"This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.","PeriodicalId":256575,"journal":{"name":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.2014.6898440","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.
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