Low gate capacitance IEGT with Trench Shield Emitter (IEGT-TSE) realizing high frequency operation

K. Matsushita, H. Ninomiya, T. Naijo, M. Izumi, S. Umekawa
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引用次数: 7

Abstract

A novel IEGT (Injection Enhanced Gate Transistor) design for drastically reducing of gate capacitance has been proposed in this work. The device structure named IEGT-TSE (IEGT with Trench Shield Emitter) has a dummy trench electrode connected to an emitter electrode. It shields gate electrode from floating p-well during switching. To demonstrate this effect, we exhibit switching waveforms by a numerical simulation and a fabricated device at 1200 blocking voltage class.
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低栅极电容IEGT与沟槽屏蔽发射极(IEGT- tse)实现高频工作
本文提出了一种新型的注入增强型栅极晶体管(IEGT)设计,可大幅降低栅极电容。该器件结构名为IEGT- tse (IEGT with Trench Shield Emitter),其假沟槽电极与发射极连接。它在开关过程中屏蔽栅电极的p阱浮动。为了证明这种效应,我们通过数值模拟和制造器件展示了1200级阻断电压下的开关波形。
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