{"title":"Off-centering reduction of coplanar micro liquid lens using a thickness-gradient dielectric","authors":"Yangkyu Park, Seungwan Seo, Jong-Hyun Lee","doi":"10.1109/OMEMS.2012.6318876","DOIUrl":null,"url":null,"abstract":"We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"96 5","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318876","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.
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