Effects of physical parameters on subthreshold characteristics of nitride and antimonide-based double material gate (DMG) HEMTs

Arman-Ur-Rashid, M. A. Hossain, Tanvir Rahman, F. M. Mohammedy
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Abstract

In this papar we have varied the physical parameters of double material gate (DMG) HEMT and noted the change in subthreshold characteristics. The physical parameters are: control-gate length, barrier layer thickness and the work function difference between two gate materials. A semi-classical analytical model has been used to determine the channel potential and electric field. One nitride-based and three antimonide-based formations have been used in this work and their results have been compared. We have found that nitride-based DMG HEMTs are less sensitive to process variation of gate fabrication compared to antimonide-based DMG HEMTs. It has been seen that variation in barrier layer thickness affects nitride-based HEMTs more strongly than antimonide-based DMG HEMTs, while the effect of change in workfunction difference is more prominent in antimonide-based HEMTs. Among the antimonide-based HEMTs, it have been seen that the formation with deep conduction band discontinuity is more susceptible to change in control-gate length than formations with shallow conduction band discontinuity. But effects of barrier layer thickness change and change in workfunction difference are more noticeable in shallow conduction band formations, making these formations more effective as double material gate (DMG) structures.
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物理参数对氮和锑基双材料栅极hemt亚阈值特性的影响
在本文中,我们改变了双材料栅极HEMT的物理参数,并注意到其亚阈值特性的变化。物理参数为:控制栅长度、阻挡层厚度和两种栅材料的功函数差。用半经典解析模型确定了通道电位和电场。在这项工作中使用了一种氮基和三种锑基地层,并对其结果进行了比较。我们发现氮基DMG hemt与锑基DMG hemt相比,对栅极制造工艺变化的敏感性较低。研究发现,势垒层厚度变化对氮基hemt的影响强于锑基DMG hemt,而功函数差变化对锑基hemt的影响更为显著。在锑基hemt中,深导带不连续的地层比浅导带不连续的地层更容易受到控制栅长度变化的影响。而在浅层导带层中,势垒层厚度变化和功函数差变化的影响更为明显,使得这些层作为双材料栅极(DMG)结构更有效。
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