{"title":"A novel angular rate sensor employing flexural plate wave","authors":"C. S. Lee, K. No, D. Wee, J. H. Lee, C. Choi","doi":"10.1109/ULTSYM.1999.849447","DOIUrl":null,"url":null,"abstract":"We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZr<sub>x</sub>Ti<sub>1-x</sub>O<sub>3</sub> (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.","PeriodicalId":339424,"journal":{"name":"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1999.849447","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZrxTi1-xO3 (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
