{"title":"Fast field solver programs for thermal and electrostatic analysis of microsystem elements","authors":"V. Székely, M. Rencz","doi":"10.1109/ICCAD.1997.643612","DOIUrl":null,"url":null,"abstract":"To solve the problem of fast thermal and electrostatic simulation of microsystem elements two different field solver tools have been developed at TUB. The /spl mu/S-THERMANAL program is capable for the fast steady state and dynamic simulation of suspended multilayered microsystem structures, while the 2D-SUNRED program is the first version of a general field solver program, based on an original method, successive network reduction. This program offers a very fast and accurate substitute for FEM programs for the solution of the Poisson equation, e.g. solving a 32000 grid problem in about 6 minutes on a 586 PC. Application examples show the usability of the tools.","PeriodicalId":187521,"journal":{"name":"1997 Proceedings of IEEE International Conference on Computer Aided Design (ICCAD)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 Proceedings of IEEE International Conference on Computer Aided Design (ICCAD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCAD.1997.643612","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
To solve the problem of fast thermal and electrostatic simulation of microsystem elements two different field solver tools have been developed at TUB. The /spl mu/S-THERMANAL program is capable for the fast steady state and dynamic simulation of suspended multilayered microsystem structures, while the 2D-SUNRED program is the first version of a general field solver program, based on an original method, successive network reduction. This program offers a very fast and accurate substitute for FEM programs for the solution of the Poisson equation, e.g. solving a 32000 grid problem in about 6 minutes on a 586 PC. Application examples show the usability of the tools.
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