{"title":"Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposition on copper foils","authors":"C. Liang, Wenrong Wang, Tie Li, Yuelin Wang","doi":"10.1109/3M-NANO.2012.6472974","DOIUrl":null,"url":null,"abstract":"In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2012.6472974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this paper, a traditional chemical vapor deposition method for synthesis of single-crystal graphene domains on copper foils was optimized by modulating the growth parameters. This provided us a low-cost and high-yield method for large-area single-crystal graphene domain growth. By this way, single-crystal graphene domains larger than 10μm were synthesized with a gas flow of 1000sccm argon, 40sccm hydrogen and 1.5sccm low-concentration methane for 15min after 3h pre-annealing. The morphologies of as-synthesized samples were characterized by Raman spectrum, optical microscope and scanning electron microscope. The result showed that the 10μm graphene domains were monolayer single crystals.