{"title":"Buckling propagation of thin films on elastic substrates under alternating load","authors":"W. He, Shibin Wang, D. Cui, H. Jia, Lin’an Li","doi":"10.1109/3M-NANO.2012.6472976","DOIUrl":null,"url":null,"abstract":"Thin metal films deposited on elastic substrates are widely used as electrodes and interconnects in Micro-Electro-Mechanical Systems (MEMS) and their fatigue property needs to be sufficiently understood. In this paper, the buckling propagation of nano-thin film relying on a substrate under alternating load has been experimentally studied. The effect of loading condition on buckling propagation is discussed in terms of the frequency, film thickness and number of cycles. In particular, buckling growth rate has been analyzed by means of digital image processing technology. Moreover, two kinds of samples have been designed to compare the influence of different materials.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2012.6472976","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Thin metal films deposited on elastic substrates are widely used as electrodes and interconnects in Micro-Electro-Mechanical Systems (MEMS) and their fatigue property needs to be sufficiently understood. In this paper, the buckling propagation of nano-thin film relying on a substrate under alternating load has been experimentally studied. The effect of loading condition on buckling propagation is discussed in terms of the frequency, film thickness and number of cycles. In particular, buckling growth rate has been analyzed by means of digital image processing technology. Moreover, two kinds of samples have been designed to compare the influence of different materials.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
