{"title":"Monolithic integrated MEMS mirror array module towards low electrical interference","authors":"T. Sakata, M. Usui, J. Kodate, Y. Jin","doi":"10.1109/OMEMS.2012.6318840","DOIUrl":null,"url":null,"abstract":"A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318840","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A MEMS mirror array module monolithically integrates a MEMS mirror chip with shield walls bonded to a control electrode chip. The fabricated mirror array module successfully operates with low electrical interference.
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