J. M. Nassar, G. T. Sevilla, Seneca J. Velling, M. D. Cordero, M. Hussain
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引用次数: 10
Abstract
We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
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