P. de Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. van Hoof
{"title":"Thermal infrared detection using linear arrays of poly SiGe uncooled microbolometers","authors":"P. de Moor, Y. Creten, C. Goessens, B. Grietens, V. Leonov, J. Vermeiren, C. van Hoof","doi":"10.1109/ICM.2003.238498","DOIUrl":null,"url":null,"abstract":"In this paper, we discuss the SiGe technology for uncooled microbolometer arrays of small format, ie 200/spl times/1 and 14/spl times/14, is transferred from IMEC to XenICs allowing of the poly-SiGe arrays for application in non-contact temperature measurements, infrared spectroscopy, technological process monitoring, quality control, etc. The arrays demonstrate an exceptional uniformity, about 100% pixel yield, 100% operability, and a NETD of about 100 mK at a readout level. These advantages combined with a possibility of hermetic zero-level micropacking make the SiGe technology a proper one for the low-cost production of infrared arrays.","PeriodicalId":180690,"journal":{"name":"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2003.238498","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
In this paper, we discuss the SiGe technology for uncooled microbolometer arrays of small format, ie 200/spl times/1 and 14/spl times/14, is transferred from IMEC to XenICs allowing of the poly-SiGe arrays for application in non-contact temperature measurements, infrared spectroscopy, technological process monitoring, quality control, etc. The arrays demonstrate an exceptional uniformity, about 100% pixel yield, 100% operability, and a NETD of about 100 mK at a readout level. These advantages combined with a possibility of hermetic zero-level micropacking make the SiGe technology a proper one for the low-cost production of infrared arrays.
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