{"title":"Micro-Scale Structures and Nano-Scale Materials for Chemical and Biological Sensors","authors":"D. Nagel","doi":"10.1109/SMELEC.2006.381005","DOIUrl":null,"url":null,"abstract":"Semiconductor and other materials with dimensions on the scale of micrometers or nanometers are being made into chemical and biological sensors. Besides being small, such devices are highly capable, low power and relatively inexpensive. They have many applications in personal health and safety, and for control of industrial processes.","PeriodicalId":136703,"journal":{"name":"2006 IEEE International Conference on Semiconductor Electronics","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Conference on Semiconductor Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2006.381005","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Semiconductor and other materials with dimensions on the scale of micrometers or nanometers are being made into chemical and biological sensors. Besides being small, such devices are highly capable, low power and relatively inexpensive. They have many applications in personal health and safety, and for control of industrial processes.
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