{"title":"A Practical VLSI Characterization and Failure Analysis System for the IC User","authors":"R. King, J. Hiatt","doi":"10.1109/IRPS.1986.362115","DOIUrl":null,"url":null,"abstract":"Instrumentation for characterization and failure analysis of VLSI devices is described. The system combines functional and parametric test capability with voltage contrast imaging techniques. Digital signal processing allows comparison of good and bad devices to isolate faults. Reasonable cost and complexity makes the system appropriate for the IC user rather than limiting it to development applications. Specific application histories are presented.","PeriodicalId":354436,"journal":{"name":"24th International Reliability Physics Symposium","volume":"71 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1986-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"24th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1986.362115","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Instrumentation for characterization and failure analysis of VLSI devices is described. The system combines functional and parametric test capability with voltage contrast imaging techniques. Digital signal processing allows comparison of good and bad devices to isolate faults. Reasonable cost and complexity makes the system appropriate for the IC user rather than limiting it to development applications. Specific application histories are presented.
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